High frequency RF power supply TXR, TXL, TXM, TXH series
- Installed the latest CPU (high-speed response performance UP)
- Supports new communication methods (compatible with EtherCAT)
- 300W~compatible
- AB class linear AMP that can withstand high reflection
- Reduce costs, lightweight semi-rack model (compared to our company: width and weight are below 1/2)
- Compatible with 300W to 5kW
- AB class linear AMP capable of withstanding high reflection
- High reliability and high durability design
- Corresponding to 300W to 30kW
Automatic Impedance Matching Device AMVG Series
- Can achieve high-speed automatic integration
- Monitor chamber impedance on the Smith chart
- Use dedicated software to display in real time, traveling waves, reflected wave power, etc.
Bipolar DC Power Supply BP020A
- Multiple output modes can be achieved on a single power supply.
- Bipolar output with variable duty can be achieved.
- DC and DC pulse output modes can be achieved.
- Equipped with high-speed arc interruption function.
- Applied to plasma processing equipment
- Not affected by heat dissipation caused by high voltage and vibrating parts
- The set environment is also suitable for a wide range