High frequency RF power supply TXR, TXL, TXM, TXH series

  • Installed the latest CPU (high-speed response performance UP)
  • Supports new communication methods (compatible with EtherCAT)
  • 300W~compatible
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TX Series

  • AB class linear AMP that can withstand high reflection
  • Reduce costs, lightweight semi-rack model (compared to our company: width and weight are below 1/2)
  • Compatible with 300W to 5kW
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AX Series

  • AB class linear AMP capable of withstanding high reflection
  • High reliability and high durability design
  • Corresponding to 300W to 30kW
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Automatic Impedance Matching Device AMVG Series

  • Can achieve high-speed automatic integration
  • Monitor chamber impedance on the Smith chart
  • Use dedicated software to display in real time, traveling waves, reflected wave power, etc.
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Bipolar DC Power Supply BP020A

  • Multiple output modes can be achieved on a single power supply.
  • Bipolar output with variable duty can be achieved.
  • DC and DC pulse output modes can be achieved.
  • Equipped with high-speed arc interruption function.
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Microwave power supply

  • Applied to plasma processing equipment
  • Not affected by heat dissipation caused by high voltage and vibrating parts
  • The set environment is also suitable for a wide range
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