Microwave power supply
- Applied to plasma processing equipment
- Not affected by heat dissipation caused by high voltage and vibrating parts
- The set environment is also suitable for a wide range
Keywords: Microwave power supply
Classification: Microwave power supply
Inquiry：
Features
- Corresponding to plasma treatment system equipment
- Lightweight high-voltage power supply and vibration components
- Using low-drift magnetron
- Using RS485 control equipment and microwave power supply (standard equipped)
- Compatible with other digital communications
- Not affected by the heat dissipation of the high-voltage power supply and vibration components, and the setting environment is suitable for a wide range
- Built-in isolator (vibrator + isolator integrated type)
Specifications
| AC Power Supply | 3Φ AC200V±10% 50/60Hz within 20A |
|---|---|
| Maximum Output | 3000W |
| Output Variable Range | 300W～3000W *Note: Due to the characteristics of the magnetron, output linear accuracy cannot be guaranteed when outputting within 600W. |
| Output Linear Accuracy | Within ±3% of the set power |
| Output Stability | For voltage variations of ±10%, within ±1% |
| Output Ripple | Below 5% p-p |
| Cooling Method | Water Cooling |
| Appearance Dimensions | W480xH221.5xD631 (mm) |
| Weight | Approximately 30kg |
Appearance Diagram
Microwave Automatic Regulator
Specifications
| Frequency Range | 2450MHz±30MHz |
|---|---|
| Permissible Through Power | 3kW Continuous Wave (Power ripple below 10%) |
| Matching Accuracy | Within ±1% (power ratio) * |
| Matching Speed | Within 3 seconds * |
| Cooling Method | Water Cooling |
*Results from experiments using the company's analog load and test equipment.
*For specific details, please consult separately.
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