ADTECPlasmaTechnology Products
High-frequency radio frequency power supply
- Highly reliable products designed to withstand high reflectivity and durability.
- Provide products that reduce costs
- Latest CPU installed (high speed response performance UP)
- Support for new communication methods (EtherCAT compatible)
Automatic Impedance Matching Device AMVG Series
- Can achieve high-speed automatic integration
- Monitor chamber impedance on the Smith chart
- Use dedicated software to display in real time, traveling waves, reflected wave power, etc.
IDX Products
Bipolar DC Power Supply BP020A
- Multiple output modes can be achieved on a single power supply.
- Bipolar output with variable duty can be achieved.
- DC and DC pulse output modes can be achieved.
- Equipped with high-speed arc interruption function.
Microwave power supply
- Applied to plasma processing equipment
- Not affected by heat dissipation caused by high voltage and vibrating parts
- The set environment is also suitable for a wide range