ADTECPlasmaTechnology Products

High-frequency radio frequency power supply

  • Highly reliable products designed to withstand high reflectivity and durability.
  • Provide products that reduce costs
  • Latest CPU installed (high speed response performance UP)
  • Support for new communication methods (EtherCAT compatible)
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Automatic Impedance Matching Device AMVG Series

  • Can achieve high-speed automatic integration
  • Monitor chamber impedance on the Smith chart
  • Use dedicated software to display in real time, traveling waves, reflected wave power, etc.
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IDX Products

Bipolar DC Power Supply BP020A

  • Multiple output modes can be achieved on a single power supply.
  • Bipolar output with variable duty can be achieved.
  • DC and DC pulse output modes can be achieved.
  • Equipped with high-speed arc interruption function.
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Microwave power supply

  • Applied to plasma processing equipment
  • Not affected by heat dissipation caused by high voltage and vibrating parts
  • The set environment is also suitable for a wide range
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